FEG SEM – JEOL 7800F Prime

The Oxford EBSD system has a maximum resolution of 1244 × 1024 pixels, and, with 8 × 8 binning of the diffraction pattern, can be run at a maximum speed of 3000 Hz. With no binning and moderate beam currents (400 pA), a well prepared, strongly diffracting sample will allow the Oxford Symmetry system to run at a speed of 240 Hz.

The Oxford X-Max 20 is a 20 mm2 silicon drift EDS detector (SDD) capable of high throughput, good peak resolution (127 eV at Mn Ka), light element detection (down to Be) and hyperspectral mapping. CSIRO Mineral Resources Microbeam Laboratory is also fully equipped to conduct fully standardised quantitative EDS analysis using “in-house” developed, proprietary software.

The Oxford Symmetry and X-Max 20 systems are supported by the latest Oxford Aztec HKL software. This software is a fully integrated EBSD and EDS platform, capable of simultaneous acquisition of EBSD and EDS datasets and able to use the EDS data to assist the EBSD system to index each pixel (i.e., measure the orientation of and assign a phase to each pixel). This feature greatly enhances EBSD results since EBSD can have difficulty differentiating phases that have very similar crystal structures, even if their chemistries are distinct.

The software supports analysis of individual grain orientation, grain size and distribution data, grain boundary and coincident site lattice (CSL) information, preferred orientation information (pole figures, inverse pole figures and orientation distribution functions (ODF’s)) and phase identification.